International SEMATECH released its Top Technical Challenges for 2005, re-emphasizing advanced gate stack, 193nm immersion and EUV lithography, and low-k dielectrics, and placing 3-D interconnect on the list for the first time.
International SEMATECH released its Top Technical Challenges for 2005, re-emphasizing advanced gate stack, 193nm immersion and EUV lithography, and low-k dielectrics, and placing 3-D interconnect on the list for the first time.