New Process Creates 3-D Nanostructures with Magnetic Materials

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Working in the trenches: Transmission electron microscopy image of a thin cross section of 160 nanometer trenches shows deposited nickel completely filling the features without voids. (Color added for clarity.) Credit: NIST
Working in the trenches: Transmission electron microscopy image of a thin cross section of 160 nanometer trenches shows deposited nickel completely filling the features without voids. (Color added for clarity.) Credit: NIST

Materials scientists at the National Institute of Standards and Technology (NIST) have developed a process to build complex, three-dimensional nanoscale structures of magnetic materials such as nickel or nickel-iron alloys using techniques compatible with standard semiconductor manufacturing. The process could enable whole new classes of sensors and microelectromechanical (MEMS) devices.


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