Low-power voltage controlled oscillators in 90nm CMOS using high-quality thin-film post-processed inductors

IMEC realized a 5GHz and 15GHz low-power voltage controlled oscillator (VCO) by post-processing high-quality (Q) inductors on top of 90nm RF CMOS devices using a thin-film wafer-level packaging (WLP) technology. These results prove that IMEC’s WLP technology is a promising solution for the integration of low-power high-performance RF and microwave systems.