Novel Ion Optics Design Ensures High Sensitivity And Mass Resolution For 3D Atom Probe

The combination of the high mass-resolution reflectron lens and a patented, three pair delay line detector brings exceptional sensitivity to the 3-Dimensional Atom Probe (3DAP) from Oxford nanoScience Ltd. This unique combination brings the best atom probe mass resolution available commercially both at the conventionally quoted Full Width at Tenth Maximum (FWTM) and the much more challenging Full Width Thousandth Maximum (FW0.1%M). This makes the instrument particularly well suited to the detection of small quantities of dopant materials. In addition, unlike other commercially available detectors, up to 98.5% of the detected atoms are both spatially located and chemically identified.