UMC Produces Working 45-nanometer ICs
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UMC, a leading global semiconductor foundry, today announced that it has successfully produced functional 45-nanometer SRAM chips that feature an impressive bit cell size of less than 0.25um2. The ICs, produced using UMC's independently developed logic process, used sophisticated immersion lithography for its 12 critical layers and incorporated the latest technology advancements such as ultra shallow junction, mobility enhancement techniques, and ultra low-k dielectrics (k=2.5).
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