IMEC reports 40 microwatt from micromachined piezoelectric energy harvester

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Top view of micro-machined piezoelectric converters (before wafer bonding) realized by IMEC. Credit: IMEC
Top view of micro-machined piezoelectric converters (before wafer bonding) realized by IMEC. Credit: IMEC

IMEC has fabricated an energy harvester to generate energy from mechanical vibrations by using micromachining technology. The harvester comes together with a model which can be used to optimize the device during design. Output powers up to 40µW were obtained which are in range of the required power for wireless sensor applications.


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