Researchers push resonator frequency limit

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Scanning Electron Micrograph of a dielectrically transduced silicon bar resonator. The inset shows the thin (15 nanometers) dielectric layer.
Scanning Electron Micrograph of a dielectrically transduced silicon bar resonator. The inset shows the thin (15 nanometers) dielectric layer.

Many researchers in microelectromechanical systems (MEMS) have focused on resonators -- tiny devices that vibrate at radio frequencies -- to replace quartz crystals and other oscillators and can be economically integrated directly into a silicon chip.


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