Search results for extreme ultraviolet lithography

Condensed Matter May 2, 2024

Research demonstrates high qubit control fidelity and uniformity in single-electron control

The journal Nature has published a research paper, "Probing single electrons across 300-mm spin qubit wafers," demonstrating state-of-the-art uniformity, fidelity and measurement statistics of spin qubits. The industry-leading ...

Optics & Photonics Jan 17, 2024

Large, all-glass metalens images sun, moon and nebulae

Metalenses have been used to image microscopic features of tissue and resolve details smaller than a wavelength of light. Now they are going bigger.

Optics & Photonics Dec 13, 2023

A new method to fabricate optical devices that more closely match their design specifications

Photolithography involves manipulating light to precisely etch features onto a surface, and is commonly used to fabricate computer chips and optical devices like lenses. But tiny deviations during the manufacturing process ...

Optics & Photonics Sep 13, 2023

New tool measures plasma source and color of light simultaneously to improve microchip production

Researchers at MESA+ Institute for Nanotechnology developed a tool that can measure the size of a plasma source and the color of the light it emits simultaneously. "Measuring both at the same time enables us to further improve ...

Plasma Physics Jun 13, 2023

Physicists developed faster algorithm for the simulation motion of microparticles in a plasma flow

Understanding the mechanisms of interaction between plasma and microparticles is of a critical importance in various fields, including astrophysics, microelectronics, and plasma medicine. A common experimental approach for ...

Analytical Chemistry Apr 23, 2021

Synthesis method expands material possibilities

Since the beginning of civilization, humans have exploited new materials to improve their lives, from the prehistoric Stone Age, Bronze Age, and Iron Age to the modern Silicon Age. With each period came technological breakthroughs ...

Optics & Photonics Jan 25, 2021

Researchers achieve extreme-ultraviolet spectral compression by four-wave mixing

Researchers from the Max Born Institute for Nonlinear Optics and Short Pulse Spectroscopy (MBI) have developed a new method to modify the spectral width of extreme-ultraviolet (XUV) light. By employing a novel phase-matching ...

Plasma Physics Jun 24, 2020

Improved understanding of the behavior of electrons in plasmas

Plasmas are strongly associated with thermonuclear reactions inside stars such as the sun, but in modern society, plasmas have found application in lithographic processes and decontamination techniques. High-temperature plasmas, ...

Materials Science Jun 2, 2020

Light for lithography could pass printed fibers

University of Utah researchers have developed a printed fiber-based light modulating system that combines polymer printing and quantum wave optics, providing a new lithography platform.

Materials Science May 27, 2020

Hotel Ruthenium: how hydrogen checks in but never leaves

How does hydrogen form blisters in ruthenium mirrors for extreme UV (EUV) lithography machines? An M2i research project by Chidozie Onwudinanti and colleagues at DIFFER, Eindhoven University of Technology and University of ...

page 1 from 8