High-performance MoS2 field-effect transistors

A team of researchers from Purdue University, SEMATECH and SUNY College of Nanoscale Science and Engineeringwill present at the 2014 Symposium on VLSI Technology on their work involving high-performance molybdenum disulfide ...

Higher dose sensitivity progress in novel photoresist platforms

SEMATECH announced today that researchers have reported progress which could significantly improve resist sensitivity by incorporating metal oxide nanoparticles for extreme ultraviolet (EUV) lithography, bringing the technology ...