Leiden physicists found a surprising interaction between electrons and a resist layer. The resist appears to charge and discharge due to incoming electrons. Publication in Physical Review Letters.
General Physics
Feb 7, 2018
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The radiation belts of Earth and Saturn differ more strongly than previously assumed. In these belts, very energetic particles, such as electrons and protons, move around the planet at high velocities - captured by its magnetic ...
Space Exploration
Oct 30, 2017
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517
Thanks to precision calibration measurements recently performed at NIST, satellites may soon be looking at sunlight with new and improved vision.
Space Exploration
Aug 26, 2014
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SEMATECH announced today that researchers have reported progress which could significantly improve resist sensitivity by incorporating metal oxide nanoparticles for extreme ultraviolet (EUV) lithography, bringing the technology ...
Electronics & Semiconductors
May 13, 2014
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SEMATECH announced today that researchers have reached a significant milestone in reducing tool-generated defects from the multi-layer deposition of mask blanks used for extreme ultraviolet (EUV) lithography, pushing the ...
Electronics & Semiconductors
May 7, 2014
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When you heat a tiny droplet of liquid tin with a laser, plasma forms on the surface of the droplet and produces extreme ultraviolet (EUV) light, which has a higher frequency and greater energy than normal ultraviolet.
Optics & Photonics
Oct 4, 2013
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The Solar Dynamics Observatory (SDO) was launched on 11 February 2010, and the EUV Variability Experiment (EVE), one of the three solar instruments aboard SDO, began normal operations on 1 May 2010.
Space Exploration
Jun 21, 2012
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Imec today announces that it has released an early-version PDK (process development kit) for 14nm logic chips. This PDK is the industry’s first to address the 14nm technology node. It targets the introduction of a number ...
Electronics & Semiconductors
Mar 7, 2012
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(PhysOrg.com) -- Most integrated circuits today are made by using extreme ultraviolet (EUV) lithography technology, but that could change, according to Burn Lin, Micropatterning Director at Taiwan Semiconductor Manufacturing ...
Plasma etching (using an ionized gas to carve tiny components on silicon wafers) has long enabled the perpetuation of Moore's Law -- the observation that the number of transistors that can be squeezed into an integrated circuit ...
Plasma Physics
Nov 10, 2011
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